Water-Assisted Synthesis of Molybdenum Disulfide Film with SingleOrganic Liquid Precursor

Collection with item attached
2017
Item details URL
http://open-repository.kisti.re.kr/cube/handle/open_repository/486969.do
DOI
10.1038/s41598-017-02228-8
Title
Water-Assisted Synthesis of Molybdenum Disulfide Film with SingleOrganic Liquid Precursor
Description
This work was supported by Basic Science Research Program through theNational Research Foundation of Korea (NRF) funded by the Ministry ofScience, ICT & Future Planning (2015R1C1A1A02037083) and the KoreaInstitute of Energy Technology Evaluation and Planning (KETEP) and theMinistry of Trade, Industry & Energy(MOTIE) of the Republic of Korea(No. 20152020001930). W.Y. acknowledges support from Basic ScienceResearch Program through the National Research Foundation of Korea (NRF)funded by the Ministry of Education (Nos. 2015R1D1A1A01058991 and2016R1S6A1A03012877). J.H.P. acknowledges support from the Institute forBasic Science (IBS-R011-D1). J.S.L. and S.M.K. acknowledges support fromthe Korea Institute of Science and Technology (KIST) InstitutionalProgram.
abstract
We report on the synthesis of large-area molybdenum disulfide (MoS2) film on an insulating substrate by means of chemical vapor deposition. A single mixture of molybdenum hexacarbonyl (Mo(CO)(6)) and dimethyl disulfide (C2H6S2) was utilized as an organic liquid precursor for the synthesis of MoS2 film. Carbon impurities stemming from the dissociation of the organic precursor are effectively removed by water oxidation, and hydrogen gas, which is a by-product of the oxidation of carbon impurities, inhibits the formation of molybdenum oxides. The use of a liquid precursor assisted with water oxidation ensures high reproducibility and full-coverage of MoS2 film for large area, which is not typically achieved with solid precursors such as molybdenum oxide and sulfur powder. We believe that our approach will advance the synthesis of transition metal dichalcogenides.
provenance
Made available in Cube on 2018-09-28T16:21:46Z (GMT). No. of bitstreams: 0
language
English
author
Choi, Soo Ho
Stephen, Boandoh
Park, Ji-Hoon
Lee, Joo Song
Kim, Soo Min
Yang, Woochul
Kim, Ki Kang
accessioned
2018-09-28T16:21:46Z
available
2018-09-28T16:21:46Z
issued
2017
citation
SCIENTIFIC REPORTS(7)
issn
2045-2322
uri
http://open-repository.kisti.re.kr/cube/handle/open_repository/486969.do
Funder
과학기술정보통신부
Funding Program
기초과학연구원연구운영비지원
Project ID
1711061426
Jurisdiction
Rep.of Korea
Project Name
Integrated Nanostructure Physics Research
rights
openAccess
type
article


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