Vibration-Assisted Femtosecond Laser Drilling with Controllable TaperAngles for AMOLED Fine Metal Mask Fabrication

Collection with item attached
2017
Item details URL
http://open-repository.kisti.re.kr/cube/handle/open_repository/486884.do
DOI
10.3390/ma10020212
Title
Vibration-Assisted Femtosecond Laser Drilling with Controllable TaperAngles for AMOLED Fine Metal Mask Fabrication
Description
This work was partially supported by the Center for AdvancedSoft-Electronics funded by the Ministry of Science, ICT and FuturePlanning (CASE-2016M3A6A5929198) Korea, the Basic Research Fund of KoreaInstitute of Machinery & Materials (SC1240). This research was alsopartially supported financially by the Ministry of Trade, Industry andEnergy (MOTIE) and the Korea Institute for Advancement of Technology(KIAT) through the International Cooperative R&D program(N0001702_Development of 100 Femtosecond Laser based Ultra-precisionManufacturing System for Smart AMOLED Display).
abstract
This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Emitting Diode (AMOLED) manufacturing. The taper angle of the hole is adjusted by attaching the objective lens to a micro-vibrator and continuously changing the focal plane position. Eight laser pulses were used to examine how the hole characteristics vary with the first focal plane's position, where the first pulse is focused at an initial position and the focal planes of subsequent pulses move downward. The results showed that the hole taper angle can be controlled by varying the amplitude of the continuously operating vibrator during femtosecond laser hole machining. The taper angles were changed between 31.8 degrees and 43.9 degrees by adjusting the vibrator amplitude at a frequency of 100 Hz. Femtosecond laser hole drilling with controllable taper angles is expected to be used in the precision micro-machining of various smart devices.
provenance
Made available in Cube on 2018-09-28T16:19:29Z (GMT). No. of bitstreams: 0
language
English
author
Choi, Wonsuk
Kim, Hoon Young
Jeon, Jin Woo
Chang, Won Seok
Cho, Sung-Hak
orcid
Kim, Hoon-Young/0000-0001-7448-1108
accessioned
2018-09-28T16:19:29Z
available
2018-09-28T16:19:29Z
issued
2017
citation
MATERIALS(10): 2
issn
1996-1944
uri
http://open-repository.kisti.re.kr/cube/handle/open_repository/486884.do
Funder
산업통상자원부
Funding Program
산업기술국제협력
Project ID
1415156300
Jurisdiction
Rep.of Korea
Project Name
Development of 100 Femtosecond Laser based Ultra-precision Manufacturing System for Smart AMOLED
rights
openAccess
subject
taper angle control
femtosecond laser
hole drilling
Invar plate
AMOLED
type
article


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