An All Oxide-Based Imperceptible Thin-Film Transistor with HumiditySensing Properties

Collection with item attached
2017
Item details URL
http://open-repository.kisti.re.kr/cube/handle/open_repository/474514.do
DOI
10.3390/ma10050530
Title
An All Oxide-Based Imperceptible Thin-Film Transistor with HumiditySensing Properties
Description
This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government (MSIP) (Grant No.NRF-2016R1C1B2012007 and 2015R1A2A2A01007409). This research was alsosupported by the Human Resources Program in Energy Technology of theKorea Institute of Energy Technology Evaluation and Planning (KETEP) ofthe Ministry of Trade, Industry and Energy, Republic of Korea (Grant No.20154030200870).
abstract
We have examined the effects of oxygen content and thickness in sputtered InSnO (ITO) electrodes, especially for the application of imperceptible amorphous-InGaZnO (a-IGZO) thin-film transistors (TFTs) in humidity sensors. The imperceptible a-IGZO TFT with 50-nm ITO electrodes deposited at Ar:O-2 = 29:0.3 exhibited good electrical performances with V-th of -0.23 V, SS of 0.34 V/dec, mu(FE) of 7.86 cm(2)/V.s, on/off ratio of 8.8 x 10(7), and has no degradation for bending stress up to a 3.5-mm curvature. The imperceptible oxide TFT sensors showed the highest sensitivity for the low and wide gate bias of -1 similar to 2 V under a wide range of relative humidity (40-90%) at drain voltage 1 V, resulting in low power consumption by the sensors. Exposure to water vapor led to a negative shift in the threshold voltage (or current enhancement), and an increase in relative humidity induced continuous threshold voltage shift. In particular, compared to conventional resistor-type sensors, the imperceptible oxide TFT sensors exhibited extremely high sensitivity from a current amplification of >10(3).
provenance
Made available in Cube on 2018-09-28T10:48:04Z (GMT). No. of bitstreams: 0
language
English
author
Kim, Kyung Su
Ahn, Cheol Hyoun
Kang, Won Jun
Cho, Sung Woon
Jung, Sung Hyeon
Yoon, Dae Ho
Cho, Hyung Koun
orcid
Cho, Hyung Koun/0000-0003-0861-523X
accessioned
2018-09-28T10:48:04Z
available
2018-09-28T10:48:04Z
issued
2017
citation
MATERIALS(10): 5
issn
1996-1944
uri
http://open-repository.kisti.re.kr/cube/handle/open_repository/474514.do
Funder
교육부
Funding Program
BK21플러스사업(0.5)
Project ID
1345274033
Jurisdiction
Rep.of Korea
Project Name
Global Elite Cultivation (GEC) center for Emergent materials
rights
openAccess
subject
a-IGZO TFT
imperceptible
ITO
humidity sensor
type
article


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