A solution-processed quaternary oxide system obtained at low-temperatureusing a vertical diffusion technique

Collection with item attached
2017
Item details URL
http://open-repository.kisti.re.kr/cube/handle/open_repository/474026.do
DOI
10.1038/srep43216
Title
A solution-processed quaternary oxide system obtained at low-temperatureusing a vertical diffusion technique
Description
This work was supported by the Industrial Strategic TechnologyDevelopment Program (10063038, Development of sub-micro in-situ lightpatterning to minimize damage on flexible substrates) funded by theMinistry of Trade, Industry & Energy (MOTIE, Korea).
abstract
We report a method for fabricating solution-processed quaternary In-Ga-Zn-O (IGZO) thin-film transistors (TFTs) at low annealing temperatures using a vertical diffusion technique (VDT). The VDT is a deposition process for spin-coating binary and ternary oxide layers consecutively and annealing at once. With the VDT, uniform and dense quaternary oxide layers were fabricated at lower temperatures (280 degrees C). Compared to conventional IGZO and ternary In-Zn-O (IZO) thin films, VDT IGZO thin film had higher density of the metal-oxide bonds and lower density of the oxygen vacancies. The field-effect mobility of VDT IGZO TFT increased three times with an improved stability under positive bias stress than IZO TFT due to the reduction in oxygen vacancies. Therefore, the VDT process is a simple method that reduces the processing temperature without any additional treatment for quaternary oxide semiconductors with uniform layers.
provenance
Made available in Cube on 2018-09-28T10:35:15Z (GMT). No. of bitstreams: 0
language
English
author
Yoon, Seokhyun
Kim, Si Joon
Tak, Young Jun
Kim, Hyun Jae
accessioned
2018-09-28T10:35:15Z
available
2018-09-28T10:35:15Z
issued
2017
citation
SCIENTIFIC REPORTS(7)
issn
2045-2322
uri
http://open-repository.kisti.re.kr/cube/handle/open_repository/474026.do
Funder
산업통상자원부
Funding Program
기계산업핵심기술개발사업
Project ID
1415151213
Jurisdiction
Rep.of Korea
Project Name
Development of sub-micro in-situ light patterning to minimize damage on flexible substrates
rights
openAccess
type
article


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