A nanoscale conical polymethyl methacrylate (PMMA) sub-wavelengthstructure with a high aspect ratio realized by a stamping method

Collection with item attached
2013
Item details URL
http://open-repository.kisti.re.kr/cube/handle/open_repository/473758.do
DOI
10.1364/OE.21.008450
Title
A nanoscale conical polymethyl methacrylate (PMMA) sub-wavelengthstructure with a high aspect ratio realized by a stamping method
Description
This work was supported by a NRF grant (No. 20110017603), the New &Renewable Energy (No. 20123010010110) of the Korea Institute of EnergyTechnology Evaluation and Planning (KETEP) grant funded by the Koreagovernment Ministry of Knowledge Economy, The World Class University(WCU) program at GIST through a grant provided by the Ministry ofEducation, Science and Technology (MEST) of Korea (No. R3110026) and bythe Core Technology Development Program for Next-Generation Solar Cellsof the Research Institute for Solar and Sustainable Energies (RISE),GIST.
abstract
A high aspect ratio conical sub-wavelength structure (SWS) was designed by using rigorous coupled-wave analysis (RCWA) method and was realized on polymethyl methacrylate (PMMA) film using a stamping technique. The silicon template containing a hexagonal array of conical holes with a period of 350 nm and an aspect ratio of 2.8 was fabricated by electron-beam (e-beam) lithography followed by a two-step etching process. The SWS with a high aspect ratio was easily transferred from the fabricated silicon template to PMMA film using the stamping method. The replicated PMMA SWS has an array of cones with nanoscale tips and an aspect ratio higher than 2.8. The average reflectance and transmittance of the PMMA film with the conical SWS in the wavelength ranging from 500 and 1500 nm was improved from 7.1 and 91.1 % to 4.3 and 94.2 %, respectively, as compared to flat PMMA film. (C) 2013 Optical Society of America
provenance
Made available in Cube on 2018-09-28T10:28:05Z (GMT). No. of bitstreams: 0
language
English
author
Kim, Dae-Seon
Kim, Dong-Hyun
Jang, Jae-Hyung
accessioned
2018-09-28T10:28:05Z
available
2018-09-28T10:28:05Z
issued
2013
citation
OPTICS EXPRESS(21): 7
issn
1094-4087
uri
http://open-repository.kisti.re.kr/cube/handle/open_repository/473758.do
Funder
산업통상자원부
Funding Program
신재생에너지융합원천기술개발(전력기금)
Project ID
1415132327
Jurisdiction
Rep.of Korea
Project Name
Development of multi-junction compound solar cell of more than 40% conversion efficiency and CPV system of 2$/Wp production cost to achieve power generation cost of 0.1$/kWh
rights
openAccess
type
article


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